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Determination of the infrared absorption cross-section of the stretching vibrations of Ge–O bonds in GeOx films. / Zhang, Fan; Volodin, V. A.; Astankova, K. N. et al.

In: Results in Chemistry, Vol. 4, 100461, 01.2022.

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Zhang F, Volodin VA, Astankova KN, Kamaev GN, Azarov IA, Prosvirin IP et al. Determination of the infrared absorption cross-section of the stretching vibrations of Ge–O bonds in GeOx films. Results in Chemistry. 2022 Jan;4:100461. doi: 10.1016/j.rechem.2022.100461

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@article{0765de2efed44d8f8159a1b89b218dd6,
title = "Determination of the infrared absorption cross-section of the stretching vibrations of Ge–O bonds in GeOx films",
abstract = "The cross-section of the infrared (IR) absorption of the Ge-O stretching mode in both GeO2 and GeOx films was determined. The GeO2 film was obtained by thermal oxidation of germanium while the GeOx film was obtained by physical vapor deposition. The latter was then annealed at a temperature of 550 °C for 30 min. Both the as-deposited and the annealed films were studied using IR absorption spectroscopy, Raman spectroscopy, ellipsometry and X-ray photoelectron spectroscopy. We found the absorption cross-section is about 2 ÷ 2.6·10–19 cm−2 for the GeO2 films and 0.8·10−19 cm−2 for the GeOx (x ∼ 1.1) film.",
keywords = "Absorption cross-section, FTIR spectroscopy, Ge-O bonds, GeO films, GeOx films",
author = "Fan Zhang and Volodin, {V. A.} and Astankova, {K. N.} and Kamaev, {G. N.} and Azarov, {I. A.} and Prosvirin, {I. P.} and M. Vergnat",
note = "Funding Information: The study was supported: in the part of growth and studies of as-deposited GeO x films by the Russian Scientific Fund (project No. 22-19-00369); in the part of studies of annealed GeO x films by the Ministry of Science and Higher Education of the Russian Federation, project No. FWGW-2022-0011. Publisher Copyright: {\textcopyright} 2022 The Author(s)",
year = "2022",
month = jan,
doi = "10.1016/j.rechem.2022.100461",
language = "English",
volume = "4",
journal = "Results in Chemistry",
issn = "2211-7156",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Determination of the infrared absorption cross-section of the stretching vibrations of Ge–O bonds in GeOx films

AU - Zhang, Fan

AU - Volodin, V. A.

AU - Astankova, K. N.

AU - Kamaev, G. N.

AU - Azarov, I. A.

AU - Prosvirin, I. P.

AU - Vergnat, M.

N1 - Funding Information: The study was supported: in the part of growth and studies of as-deposited GeO x films by the Russian Scientific Fund (project No. 22-19-00369); in the part of studies of annealed GeO x films by the Ministry of Science and Higher Education of the Russian Federation, project No. FWGW-2022-0011. Publisher Copyright: © 2022 The Author(s)

PY - 2022/1

Y1 - 2022/1

N2 - The cross-section of the infrared (IR) absorption of the Ge-O stretching mode in both GeO2 and GeOx films was determined. The GeO2 film was obtained by thermal oxidation of germanium while the GeOx film was obtained by physical vapor deposition. The latter was then annealed at a temperature of 550 °C for 30 min. Both the as-deposited and the annealed films were studied using IR absorption spectroscopy, Raman spectroscopy, ellipsometry and X-ray photoelectron spectroscopy. We found the absorption cross-section is about 2 ÷ 2.6·10–19 cm−2 for the GeO2 films and 0.8·10−19 cm−2 for the GeOx (x ∼ 1.1) film.

AB - The cross-section of the infrared (IR) absorption of the Ge-O stretching mode in both GeO2 and GeOx films was determined. The GeO2 film was obtained by thermal oxidation of germanium while the GeOx film was obtained by physical vapor deposition. The latter was then annealed at a temperature of 550 °C for 30 min. Both the as-deposited and the annealed films were studied using IR absorption spectroscopy, Raman spectroscopy, ellipsometry and X-ray photoelectron spectroscopy. We found the absorption cross-section is about 2 ÷ 2.6·10–19 cm−2 for the GeO2 films and 0.8·10−19 cm−2 for the GeOx (x ∼ 1.1) film.

KW - Absorption cross-section

KW - FTIR spectroscopy

KW - Ge-O bonds

KW - GeO films

KW - GeOx films

UR - http://www.scopus.com/inward/record.url?scp=85135691943&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/5ec0d957-aa03-3b5d-8d4f-97083c2e2778/

U2 - 10.1016/j.rechem.2022.100461

DO - 10.1016/j.rechem.2022.100461

M3 - Article

AN - SCOPUS:85135691943

VL - 4

JO - Results in Chemistry

JF - Results in Chemistry

SN - 2211-7156

M1 - 100461

ER -

ID: 36845307