Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films

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Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films. / Krisyuk, Vladislav V.; kyzy, Samara Urkasym; Rybalova, Tatyana V. et al.

In: Polyhedron, Vol. 191, 114806, 15.11.2020.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{de75656d151e434289c429654d34d1da,

title = "Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films",

abstract = "A series of new trinuclear molecular complexes [PbL12{Co(hfa)2}2] (1), [PbL12{Ni(hfa)2}2] (2), [PbL22{Co(hfa)2}2] (3), [PbL22{Ni(hfa)2}2] (4), [PbL32{Co(hfa)2}2] (5), [PbL32{Ni(hfa)2}2] (6), where L = methoxy-substituted β-diketonate RCOCHCOC(CH3)2OCH3, L1: R = CH3, L2: R = CF3, L3: R = C(CH3)3; hfa = hexafluoroacetylacetonate, were synthesized. Crystal structures were determined by single crystal X-ray analysis. Volatility and thermal stability of the obtained compounds were studied by thermal gravimetric analysis, vacuum sublimation and by mass transfer in helium flow. It was established that all the obtained heterometallic complexes are volatile and can be sublimed in vacuum without dissociation into monometallic complexes. Compounds 3–6 were examined as SSP (single source precursors) in conventional low pressure MOCVD (Metalorganic Chemical Vapor Deposition) of inorganic films on Si(1 0 0) substrates. Influence of precursor composition on their structure and thermal properties as well as on the composition of the deposited inorganic films are discussed.",

keywords = "Beta-diketonates, Composite films, Heterometallic complexes, MOCVD, Single source precursors, Volatile metalorganic complexes, DESIGN, COMPLEXES, MOLECULAR PRECURSORS, SINGLE-SOURCE PRECURSORS, ALLOY-FILMS, PD, LIGANDS",

author = "Krisyuk, {Vladislav V.} and kyzy, {Samara Urkasym} and Rybalova, {Tatyana V.} and Korolkov, {Ilya V.} and Sysoev, {Sergey V.} and Koretskaya, {Tatyana P.} and Kuchumov, {Boris M.} and Turgambaeva, {Asiya E.}",

note = "The study of the thermal properties of the compounds was supported by Russian Foundation for Basic Research (RFBR), Russian Federation, according to the research project No. 20-03-00629.",

year = "2020",

month = nov,

day = "15",

doi = "10.1016/j.poly.2020.114806",

language = "English",

volume = "191",

journal = "Polyhedron",

issn = "0277-5387",

publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films

AU - Krisyuk, Vladislav V.

AU - kyzy, Samara Urkasym

AU - Rybalova, Tatyana V.

AU - Korolkov, Ilya V.

AU - Sysoev, Sergey V.

AU - Koretskaya, Tatyana P.

AU - Kuchumov, Boris M.

AU - Turgambaeva, Asiya E.

N1 - The study of the thermal properties of the compounds was supported by Russian Foundation for Basic Research (RFBR), Russian Federation, according to the research project No. 20-03-00629.

PY - 2020/11/15

Y1 - 2020/11/15

N2 - A series of new trinuclear molecular complexes [PbL12{Co(hfa)2}2] (1), [PbL12{Ni(hfa)2}2] (2), [PbL22{Co(hfa)2}2] (3), [PbL22{Ni(hfa)2}2] (4), [PbL32{Co(hfa)2}2] (5), [PbL32{Ni(hfa)2}2] (6), where L = methoxy-substituted β-diketonate RCOCHCOC(CH3)2OCH3, L1: R = CH3, L2: R = CF3, L3: R = C(CH3)3; hfa = hexafluoroacetylacetonate, were synthesized. Crystal structures were determined by single crystal X-ray analysis. Volatility and thermal stability of the obtained compounds were studied by thermal gravimetric analysis, vacuum sublimation and by mass transfer in helium flow. It was established that all the obtained heterometallic complexes are volatile and can be sublimed in vacuum without dissociation into monometallic complexes. Compounds 3–6 were examined as SSP (single source precursors) in conventional low pressure MOCVD (Metalorganic Chemical Vapor Deposition) of inorganic films on Si(1 0 0) substrates. Influence of precursor composition on their structure and thermal properties as well as on the composition of the deposited inorganic films are discussed.

AB - A series of new trinuclear molecular complexes [PbL12{Co(hfa)2}2] (1), [PbL12{Ni(hfa)2}2] (2), [PbL22{Co(hfa)2}2] (3), [PbL22{Ni(hfa)2}2] (4), [PbL32{Co(hfa)2}2] (5), [PbL32{Ni(hfa)2}2] (6), where L = methoxy-substituted β-diketonate RCOCHCOC(CH3)2OCH3, L1: R = CH3, L2: R = CF3, L3: R = C(CH3)3; hfa = hexafluoroacetylacetonate, were synthesized. Crystal structures were determined by single crystal X-ray analysis. Volatility and thermal stability of the obtained compounds were studied by thermal gravimetric analysis, vacuum sublimation and by mass transfer in helium flow. It was established that all the obtained heterometallic complexes are volatile and can be sublimed in vacuum without dissociation into monometallic complexes. Compounds 3–6 were examined as SSP (single source precursors) in conventional low pressure MOCVD (Metalorganic Chemical Vapor Deposition) of inorganic films on Si(1 0 0) substrates. Influence of precursor composition on their structure and thermal properties as well as on the composition of the deposited inorganic films are discussed.

KW - Beta-diketonates

KW - Composite films

KW - Heterometallic complexes

KW - MOCVD

KW - Single source precursors

KW - Volatile metalorganic complexes

KW - DESIGN

KW - COMPLEXES

KW - MOLECULAR PRECURSORS

KW - SINGLE-SOURCE PRECURSORS

KW - ALLOY-FILMS

KW - PD

KW - LIGANDS

UR - http://www.scopus.com/inward/record.url?scp=85092004063&partnerID=8YFLogxK

U2 - 10.1016/j.poly.2020.114806

DO - 10.1016/j.poly.2020.114806

M3 - Article

AN - SCOPUS:85092004063

VL - 191

JO - Polyhedron

JF - Polyhedron

SN - 0277-5387

M1 - 114806

ER -

ID: 25651109