Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films. / Krisyuk, Vladislav V.; kyzy, Samara Urkasym; Rybalova, Tatyana V. и др.
в: Polyhedron, Том 191, 114806, 15.11.2020.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films
AU - Krisyuk, Vladislav V.
AU - kyzy, Samara Urkasym
AU - Rybalova, Tatyana V.
AU - Korolkov, Ilya V.
AU - Sysoev, Sergey V.
AU - Koretskaya, Tatyana P.
AU - Kuchumov, Boris M.
AU - Turgambaeva, Asiya E.
N1 - The study of the thermal properties of the compounds was supported by Russian Foundation for Basic Research (RFBR), Russian Federation, according to the research project No. 20-03-00629.
PY - 2020/11/15
Y1 - 2020/11/15
N2 - A series of new trinuclear molecular complexes [PbL12{Co(hfa)2}2] (1), [PbL12{Ni(hfa)2}2] (2), [PbL22{Co(hfa)2}2] (3), [PbL22{Ni(hfa)2}2] (4), [PbL32{Co(hfa)2}2] (5), [PbL32{Ni(hfa)2}2] (6), where L = methoxy-substituted β-diketonate RCOCHCOC(CH3)2OCH3, L1: R = CH3, L2: R = CF3, L3: R = C(CH3)3; hfa = hexafluoroacetylacetonate, were synthesized. Crystal structures were determined by single crystal X-ray analysis. Volatility and thermal stability of the obtained compounds were studied by thermal gravimetric analysis, vacuum sublimation and by mass transfer in helium flow. It was established that all the obtained heterometallic complexes are volatile and can be sublimed in vacuum without dissociation into monometallic complexes. Compounds 3–6 were examined as SSP (single source precursors) in conventional low pressure MOCVD (Metalorganic Chemical Vapor Deposition) of inorganic films on Si(1 0 0) substrates. Influence of precursor composition on their structure and thermal properties as well as on the composition of the deposited inorganic films are discussed.
AB - A series of new trinuclear molecular complexes [PbL12{Co(hfa)2}2] (1), [PbL12{Ni(hfa)2}2] (2), [PbL22{Co(hfa)2}2] (3), [PbL22{Ni(hfa)2}2] (4), [PbL32{Co(hfa)2}2] (5), [PbL32{Ni(hfa)2}2] (6), where L = methoxy-substituted β-diketonate RCOCHCOC(CH3)2OCH3, L1: R = CH3, L2: R = CF3, L3: R = C(CH3)3; hfa = hexafluoroacetylacetonate, were synthesized. Crystal structures were determined by single crystal X-ray analysis. Volatility and thermal stability of the obtained compounds were studied by thermal gravimetric analysis, vacuum sublimation and by mass transfer in helium flow. It was established that all the obtained heterometallic complexes are volatile and can be sublimed in vacuum without dissociation into monometallic complexes. Compounds 3–6 were examined as SSP (single source precursors) in conventional low pressure MOCVD (Metalorganic Chemical Vapor Deposition) of inorganic films on Si(1 0 0) substrates. Influence of precursor composition on their structure and thermal properties as well as on the composition of the deposited inorganic films are discussed.
KW - Beta-diketonates
KW - Composite films
KW - Heterometallic complexes
KW - MOCVD
KW - Single source precursors
KW - Volatile metalorganic complexes
KW - DESIGN
KW - COMPLEXES
KW - MOLECULAR PRECURSORS
KW - SINGLE-SOURCE PRECURSORS
KW - ALLOY-FILMS
KW - PD
KW - LIGANDS
UR - http://www.scopus.com/inward/record.url?scp=85092004063&partnerID=8YFLogxK
U2 - 10.1016/j.poly.2020.114806
DO - 10.1016/j.poly.2020.114806
M3 - Article
AN - SCOPUS:85092004063
VL - 191
JO - Polyhedron
JF - Polyhedron
SN - 0277-5387
M1 - 114806
ER -
ID: 25651109