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The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows. / Chepkasov, Sergey; Khomyakov, Maksim; Zolkin, Alexander et al.

Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 856-862 9242030 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Chepkasov, S, Khomyakov, M, Zolkin, A, Maksimovskii, E & Piliptsou, D 2020, The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows. in Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020., 9242030, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Institute of Electrical and Electronics Engineers Inc., pp. 856-862, 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Virtual, Tomsk, Russian Federation, 14.09.2020. https://doi.org/10.1109/EFRE47760.2020.9242030

APA

Chepkasov, S., Khomyakov, M., Zolkin, A., Maksimovskii, E., & Piliptsou, D. (2020). The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows. In Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 (pp. 856-862). [9242030] (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EFRE47760.2020.9242030

Vancouver

Chepkasov S, Khomyakov M, Zolkin A, Maksimovskii E, Piliptsou D. The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows. In Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 856-862. 9242030. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). doi: 10.1109/EFRE47760.2020.9242030

Author

Chepkasov, Sergey ; Khomyakov, Maksim ; Zolkin, Alexander et al. / The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows. Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 856-862 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

BibTeX

@inproceedings{7a94661eb1ed4532b393e5befb6e0a86,
title = "The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows",
abstract = "Tetrahedral amorphous carbon coatings (ta-C) have been deposited by pulsed vacuum arc method at different incidence angles of the carbon ions flow on the silicon substrate, determined from the axis of the flow direction and from normal to the substrate surface, and corresponded to 0°, 15°, 45° and 75°. The effect of the substrate orientation relative to the propagation direction of the pulsed carbon plasma flow on the structure, morphology, mechanical and optical properties of ta-C coatings has been studied. The study indicated a decrease in the number of nano - and macroparticles with an increase in the incidence angle of the flow. Also, a change in sp2 cluster size and their ordering with an increase in the incidence angle of the flow was found. The substrate tilting led to a decrease in the thickness, refractive index, nanohardness and Young's modulus of ta-C coatings. The optimal position of the substrate relative to the incident flow was found to be 15°. This angle corresponds to maximum values of hardness (28 GPa) and Young's modulus (227 GPa) of the coating.",
keywords = "AFM, Ellipsometry, Incidence angle, Nanoindentation, Pulsed vacuum arc, Raman spectroscopy, SEM, Tetrahedral amorphous carbon coatings",
author = "Sergey Chepkasov and Maksim Khomyakov and Alexander Zolkin and Evgeniy Maksimovskii and Dmitry Piliptsou",
note = "Funding Information: Authors thank Center of collective usage {"}VTAN{"} in ATRC department of NSU for using of Raman spectrometer. Publisher Copyright: {\textcopyright} 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 ; Conference date: 14-09-2020 Through 26-09-2020",
year = "2020",
month = sep,
day = "14",
doi = "10.1109/EFRE47760.2020.9242030",
language = "English",
series = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "856--862",
booktitle = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
address = "United States",

}

RIS

TY - GEN

T1 - The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows

AU - Chepkasov, Sergey

AU - Khomyakov, Maksim

AU - Zolkin, Alexander

AU - Maksimovskii, Evgeniy

AU - Piliptsou, Dmitry

N1 - Funding Information: Authors thank Center of collective usage "VTAN" in ATRC department of NSU for using of Raman spectrometer. Publisher Copyright: © 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 2020/9/14

Y1 - 2020/9/14

N2 - Tetrahedral amorphous carbon coatings (ta-C) have been deposited by pulsed vacuum arc method at different incidence angles of the carbon ions flow on the silicon substrate, determined from the axis of the flow direction and from normal to the substrate surface, and corresponded to 0°, 15°, 45° and 75°. The effect of the substrate orientation relative to the propagation direction of the pulsed carbon plasma flow on the structure, morphology, mechanical and optical properties of ta-C coatings has been studied. The study indicated a decrease in the number of nano - and macroparticles with an increase in the incidence angle of the flow. Also, a change in sp2 cluster size and their ordering with an increase in the incidence angle of the flow was found. The substrate tilting led to a decrease in the thickness, refractive index, nanohardness and Young's modulus of ta-C coatings. The optimal position of the substrate relative to the incident flow was found to be 15°. This angle corresponds to maximum values of hardness (28 GPa) and Young's modulus (227 GPa) of the coating.

AB - Tetrahedral amorphous carbon coatings (ta-C) have been deposited by pulsed vacuum arc method at different incidence angles of the carbon ions flow on the silicon substrate, determined from the axis of the flow direction and from normal to the substrate surface, and corresponded to 0°, 15°, 45° and 75°. The effect of the substrate orientation relative to the propagation direction of the pulsed carbon plasma flow on the structure, morphology, mechanical and optical properties of ta-C coatings has been studied. The study indicated a decrease in the number of nano - and macroparticles with an increase in the incidence angle of the flow. Also, a change in sp2 cluster size and their ordering with an increase in the incidence angle of the flow was found. The substrate tilting led to a decrease in the thickness, refractive index, nanohardness and Young's modulus of ta-C coatings. The optimal position of the substrate relative to the incident flow was found to be 15°. This angle corresponds to maximum values of hardness (28 GPa) and Young's modulus (227 GPa) of the coating.

KW - AFM

KW - Ellipsometry

KW - Incidence angle

KW - Nanoindentation

KW - Pulsed vacuum arc

KW - Raman spectroscopy

KW - SEM

KW - Tetrahedral amorphous carbon coatings

UR - http://www.scopus.com/inward/record.url?scp=85097597979&partnerID=8YFLogxK

U2 - 10.1109/EFRE47760.2020.9242030

DO - 10.1109/EFRE47760.2020.9242030

M3 - Conference contribution

AN - SCOPUS:85097597979

T3 - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

SP - 856

EP - 862

BT - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Y2 - 14 September 2020 through 26 September 2020

ER -

ID: 27085517