Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
| Original language | English |
|---|---|
| Title of host publication | Laser-Based Micro- and Nanoprocessing XI |
| Editors | U Klotzbach, K Washio, R Kling |
| Publisher | SPIE |
| Number of pages | 9 |
| Volume | 10092 |
| ISBN (Electronic) | 9781510606258 |
| ISBN (Print) | 978-1-5106-0626-5 |
| DOIs | |
| Publication status | Published - 1 Jan 2017 |
| Event | Laser-Based Micro- and Nanoprocessing XI 2017 - San Francisco, United States Duration: 31 Jan 2017 → 2 Feb 2017 |
| Name | Proceedings of SPIE |
|---|---|
| Publisher | SPIE-INT SOC OPTICAL ENGINEERING |
| Volume | 10092 |
| ISSN (Print) | 0277-786X |
| Conference | Laser-Based Micro- and Nanoprocessing XI 2017 |
|---|---|
| Country/Territory | United States |
| City | San Francisco |
| Period | 31.01.2017 → 02.02.2017 |
ID: 10192676