Study of the optical methods of formation of multilevel profile in the thin films of a hybrid photopolymer material based on thiol-siloxane and acrylate oligomers

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	466-473
Number of pages	8
Journal	Optoelectronics, Instrumentation and Data Processing
Volume	53
Issue number	5
DOIs	https://doi.org/10.3103/S8756699017050065
Publication status	Published - 1 Sept 2017

characteristic curve, hybrid photopolymer, laser writing, multilevel diffractive structures, photolithography, thiol-siloxane-acrylate oligomers, ELEMENTS, FABRICATION

ID: 9645538