Original languageEnglish
Pages (from-to)2064-2067
Number of pages4
JournalSemiconductors
Volume53
Issue number16
DOIs
Publication statusPublished - 1 Dec 2019

    OECD FOS+WOS

    Research areas

  • ellipsometry, nanoclusters, porous Ge, Raman spectroscopy, scanning electron microscopy

ID: 23261547