• Dmitry Rogilo
  • Sergey Sitnikov
  • Sergey Ponomarev
  • Dmitry Sheglov
  • Liudmila Fedina
  • Alexander Latyshev
Original languageEnglish
Article number148269
Number of pages9
JournalApplied Surface Science
Volume540
DOIs
Publication statusPublished - 28 Feb 2021

    Research areas

  • A1. Etching, A1. Morphological stability, A1. Surface processes, A3. Molecular beam epitaxy, B2. Semiconducting silicon, OXIDATION, Morphological stability, Etching, MOUND FORMATION, EPITAXY, PHASE, SI, ISLAND NUCLEATION, Molecular beam epitaxy, Semiconducting silicon, SCANNING-TUNNELING-MICROSCOPY, DIFFUSION, Surface processes, STEP PERMEABILITY, ELECTRON-MICROSCOPE

    OECD FOS+WOS

ID: 26029012