Software compensation of systematic errors for in-situ scanning profilometry

Research output: Contribution to journal › Article › peer-review

Translated title of the contribution	Программная компенсация систематических ошибок для сканирующей профилометрии in situ
Original language	English
Number of pages	7
Journal	Optics and Lasers in Engineering
Volume	206
DOIs	https://doi.org/10.1016/j.optlaseng.2026.110084
Publication status	Published - Nov 2026

Scanning profilometry, On-machine metrology, Systematic error compensation, Self-referenced measurement, Surface form reconstruction

ID: 82542086