TY - JOUR

T1 - Software compensation of systematic errors for in-situ scanning profilometry

AU - Radnatarov, D. A.

AU - Gromov, I. V.

AU - Kobtsev, S. M.

N1 - Radnatarov, D. A., Gromov, I. V., & Kobtsev, S. M. (2026). Software compensation of systematic errors for in-situ scanning profilometry. Optics and Lasers in Engineering, 206, 110084. https://doi.org/10.1016/j.optlaseng.2026.110084 Funding Ministry of Science and Higher Education of the Russian Federation (FSUS-2025-0011)

PY - 2026/11

Y1 - 2026/11

N2 - The method described in this paper is related to scanning profilometry and aims to improve measurement accuracy. It is shown that when precision optical sensors for on-the-fly measurement of the machined surface profile are integrated into production equipment, measurement accuracy is often limited not by the intrinsic resolution of the sensor but by errors in the scanning mechanics. A software method is proposed to compensate for these errors (mechanical errors, thermal drifts, &c.) when measuring surface form under such conditions. The approach is based on the use of a reference planar area within the scan region and on explicit accounting for the sequential, line-by-line structure of the measurements. Errors are separated by characteristic temporal scales into slow drifts, quasi-stationary within a line, and fast reproducible errors that repeat from line to line. Compensation is performed using data from a single measurement without referring to external standards or additional calibration procedures. The method's viability is demonstrated experimentally during inspection of optical elements, including quantitative validation on a certified step-height reference. Systematic errors are shown to be suppressed from the micron level to a magnitude limited by the resolution of the confocal sensor (≈50 nm) and flatness of reference area surface.

AB - The method described in this paper is related to scanning profilometry and aims to improve measurement accuracy. It is shown that when precision optical sensors for on-the-fly measurement of the machined surface profile are integrated into production equipment, measurement accuracy is often limited not by the intrinsic resolution of the sensor but by errors in the scanning mechanics. A software method is proposed to compensate for these errors (mechanical errors, thermal drifts, &c.) when measuring surface form under such conditions. The approach is based on the use of a reference planar area within the scan region and on explicit accounting for the sequential, line-by-line structure of the measurements. Errors are separated by characteristic temporal scales into slow drifts, quasi-stationary within a line, and fast reproducible errors that repeat from line to line. Compensation is performed using data from a single measurement without referring to external standards or additional calibration procedures. The method's viability is demonstrated experimentally during inspection of optical elements, including quantitative validation on a certified step-height reference. Systematic errors are shown to be suppressed from the micron level to a magnitude limited by the resolution of the confocal sensor (≈50 nm) and flatness of reference area surface.

KW - Сканирующая профилометрия

KW - Приборная метрология

KW - Систематическая компенсация ошибок

KW - Самостоятельное измерение

KW - Реконструкция формы поверхности

KW - Scanning profilometry

KW - On-machine metrology

KW - Systematic error compensation

KW - Self-referenced measurement

KW - Surface form reconstruction

UR - https://www.mendeley.com/catalogue/f8273981-7d8a-39de-9f8a-0438850a5099/

UR - https://www.scopus.com/pages/publications/105047905958

U2 - 10.1016/j.optlaseng.2026.110084

DO - 10.1016/j.optlaseng.2026.110084

M3 - Article

VL - 206

JO - Optics and Lasers in Engineering

JF - Optics and Lasers in Engineering

SN - 0143-8166

ER -