Original languageEnglish
Pages (from-to)109-113
Number of pages5
JournalThin Solid Films
Volume672
DOIs
Publication statusPublished - 28 Feb 2019

    Research areas

  • Electron beam lithography, Electrophysical properties, Reactive ion etching, Reflectance spectra, Silicon nanopillars

    OECD FOS+WOS

  • 2.05 MATERIALS ENGINEERING
  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 18295071