• Dmitriy V. Dmitriev
  • Ivan A. Mitrofanov
  • Danil A. Kolosovsky
  • Alexander I. Toropov
  • Konstantin S. Zhuravlev
Original languageEnglish
Title of host publication2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2020
PublisherIEEE Computer Society
Pages5-8
Number of pages4
ISBN (Electronic)9781728168463
DOIs
Publication statusPublished - 1 Jul 2020
Event21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2020 - Chemal, Russian Federation
Duration: 29 Jun 20203 Jul 2020

Publication series

NameInternational Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM
Volume2020-June
ISSN (Print)2325-4173
ISSN (Electronic)2325-419X

Conference

Conference21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2020
Country/TerritoryRussian Federation
CityChemal
Period29.06.202003.07.2020

    Research areas

  • Annealing, Indium phosphide, Phosphorous, Substitution

ID: 25292515