• N. Kumar
  • V. A. Volodin
  • S. V. Goryainov
  • A. K. Chernyshev
  • A. T. Kozakov
  • A. A. Scrjabin
  • N. I. Chkhalo
  • M. S. Mikhailenko
  • A. E. Pestov
  • M. V. Zorina
Original languageEnglish
Pages (from-to)97-102
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume534
DOIs
Publication statusPublished - 1 Jan 2023

    OECD FOS+WOS

  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

    Research areas

  • Ar ion implantation, Monocrystalline silicon, Raman spectroscopy

ID: 40100218