Polymorphic States in the Electron-Beam Exposure-Induced CaSi2 Film Growth at the CaF2 Epitaxy on Si

Original language	English
Pages (from-to)	504-509
Number of pages	6
Journal	Journal of Surface Investigation
Volume	19
Issue number	2
DOIs	https://doi.org/10.1134/S1027451025700752
Publication status	Published - 10 Sept 2025

calcium compounds, crystal structure, electron irradiation, molecular-beam epitaxy, nanostructures, polymorphs CaSi2, semiconductors, silicon

ID: 69783792