Phonon-assisted electron tunneling between traps in silicon oxide films treated in hydrogen plasma

Original language	English
Article number	120256
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	546
DOIs	https://doi.org/10.1016/j.jnoncrysol.2020.120256
Publication status	Published - 15 Oct 2020

ID: 24720701