• Denis S. Milakhin
  • Timur V. Malin
  • Vladimir G. Mansurov
  • Yury G. Galitsyn
  • Konstantin S. Zhuravlev
Original languageEnglish
Title of host publication2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2020
PublisherIEEE Computer Society
Pages14-18
Number of pages5
ISBN (Electronic)9781728168463
DOIs
Publication statusPublished - 1 Jul 2020
Event21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2020 - Chemal, Russian Federation
Duration: 29 Jun 20203 Jul 2020

Publication series

NameInternational Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM
Volume2020-June
ISSN (Print)2325-4173
ISSN (Electronic)2325-419X

Conference

Conference21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2020
Country/TerritoryRussian Federation
CityChemal
Period29.06.202003.07.2020

    Research areas

  • AlN, Inversion domains, NH3-MBE, Nitridation

ID: 25292578