Optical Properties of Nonstoichiometric Silicon Oxide SiOx(x < 2) › Research Explorer

DOI

https://doi.org/10.1134/S0030400X19110183
Final published version

V. N. Kruchinin
T. V. Perevalov
G. N. Kamaev
S. V. Rykhlitskii
V. A. Gritsenko

Original language	English
Pages (from-to)	836-840
Number of pages	5
Journal	Optics and Spectroscopy
Volume	127
Issue number	5
DOIs	https://doi.org/10.1134/S0030400X19110183
Publication status	Published - 1 Nov 2019

Research areas

ab initio modeling, ellipsometry, optical properties, silicon oxide

OECD FOS+WOS

ID: 22979414