Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition › Research Explorer

DOI

https://doi.org/10.1016/j.apsusc.2019.01.288
Final published version

M. S. Lebedev
V. N. Kruchinin
M. Yu Afonin
I. V. Korolkov
A. A. Saraev
A. A. Gismatulin
V. A. Gritsenko

Original language	English
Pages (from-to)	690-698
Number of pages	9
Journal	Applied Surface Science
Volume	478
DOIs	https://doi.org/10.1016/j.apsusc.2019.01.288
Publication status	Published - 1 Jun 2019

Research areas

Atomic layer deposition, Bixbyite, Charge transport, Refractive index, Scandium oxide, TRAPS, SCANDATE CATHODES, ELECTRICAL-PROPERTIES, RARE-EARTH, SCANDIUM OXIDE, COATINGS, CONDUCTION, DIFFUSION, EMISSION, TRANSPARENT

OECD FOS+WOS

ID: 18496328