Research output: Contribution to journal › Article › peer-review
On Raman scattering cross section ratio of crystalline and microcrystalline to amorphous silicon. / Zhigunov, D. M.; Kamaev, G. N.; Kashkarov, P. K. et al.
In: Applied Physics Letters, Vol. 113, No. 2, 023101, 09.07.2018.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - On Raman scattering cross section ratio of crystalline and microcrystalline to amorphous silicon
AU - Zhigunov, D. M.
AU - Kamaev, G. N.
AU - Kashkarov, P. K.
AU - Volodin, V. A.
N1 - Publisher Copyright: © 2018 Author(s).
PY - 2018/7/9
Y1 - 2018/7/9
N2 - In this letter, we report on accurate comparative measurements of Raman scattering from bulk crystalline Si and from hydrogenated amorphous Si thin films before and after their pulse laser annealing, performed for the purpose of Si crystalline grain formation. Being accompanied by the respective optical transmittance/reflectance measurements, these data allowed us to estimate the integrated Raman scattering cross section ratios of crystalline and microcrystalline Si to hydrogenated amorphous Si and to compare the results with those known from the literature. For crystalline Si, the obtained ratio is equal to 0.75, while for microcrystalline Si, it is equal to at least 2. Our results are found to contradict the proposed earlier exponential decay dependence of the integrated Raman scattering cross section ratio of microcrystalline to amorphous Si on the crystalline grain size. The physical reasons, which support our findings, are discussed.
AB - In this letter, we report on accurate comparative measurements of Raman scattering from bulk crystalline Si and from hydrogenated amorphous Si thin films before and after their pulse laser annealing, performed for the purpose of Si crystalline grain formation. Being accompanied by the respective optical transmittance/reflectance measurements, these data allowed us to estimate the integrated Raman scattering cross section ratios of crystalline and microcrystalline Si to hydrogenated amorphous Si and to compare the results with those known from the literature. For crystalline Si, the obtained ratio is equal to 0.75, while for microcrystalline Si, it is equal to at least 2. Our results are found to contradict the proposed earlier exponential decay dependence of the integrated Raman scattering cross section ratio of microcrystalline to amorphous Si on the crystalline grain size. The physical reasons, which support our findings, are discussed.
KW - OPTICAL-PROPERTIES
KW - POLYCRYSTALLINE SILICON
KW - VOLUME FRACTION
KW - EXCIMER-LASER
KW - THIN-FILMS
KW - SPECTROSCOPY
KW - TEMPERATURE
KW - SI
KW - THICKNESS
KW - HYDROGEN
UR - http://www.scopus.com/inward/record.url?scp=85049845504&partnerID=8YFLogxK
U2 - 10.1063/1.5037008
DO - 10.1063/1.5037008
M3 - Article
AN - SCOPUS:85049845504
VL - 113
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 2
M1 - 023101
ER -
ID: 14727146