• E. Bortchagovsky
  • C Simo
  • Ilya Milekhin
  • J Tang
  • Dietrich R.T. Zahn
  • M. Fleischer
Original languageEnglish
Article number100172
Number of pages8
JournalMicro and Nano Engineering
Volume18
DOIs
Publication statusPublished - Apr 2023
Externally publishedYes

    OECD FOS+WOS

  • 2.05 MATERIALS ENGINEERING
  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 43522637