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Local anodic oxidation of solid GeO films: The nanopatterning possibilities

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1016/j.surfin.2016.11.010
Final published version

K. N. Astankova
E. B. Gorokhov
I. A. Azarov
V. A. Volodin
A. V. Latyshev

Original language	English
Pages (from-to)	56-59
Number of pages	4
Journal	Surfaces and Interfaces
Volume	6
DOIs	https://doi.org/10.1016/j.surfin.2016.11.010
Publication status	Published - 1 Mar 2017

OECD FOS+WOS

Research areas

Germanium dioxide, Germanium monoxide, Local anodic oxidation, Nanowires, THIN-FILMS, HUMIDITY, SILICON, SURFACE, SCANNING PROBE LITHOGRAPHY, NANO-OXIDATION, ATOMIC-FORCE MICROSCOPE

ID: 10277252