Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
| Original language | English |
|---|---|
| Title of host publication | International Conference on Micro- and Nano-Electronics 2021 |
| Editors | Vladimir F. Lukichev, Konstantin V. Rudenko |
| Publisher | The International Society for Optical Engineering |
| ISBN (Electronic) | 9781510651906 |
| DOIs | |
| Publication status | Published - 31 Jan 2022 |
| Event | 14th International Conference on Micro- and Nano-Electronics 2021 - Zvenigorod, Russian Federation Duration: 4 Oct 2021 → 8 Oct 2021 Conference number: 14 |
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 12157 |
| ISSN (Print) | 0277-786X |
| ISSN (Electronic) | 1996-756X |
| Conference | 14th International Conference on Micro- and Nano-Electronics 2021 |
|---|---|
| Abbreviated title | ICMNE 2021 |
| Country/Territory | Russian Federation |
| City | Zvenigorod |
| Period | 04.10.2021 → 08.10.2021 |
ID: 35611312