Layer exchange during aluminum-induced crystallization of silicon suboxide thin films › Research Explorer

DOI

https://doi.org/10.1016/j.matlet.2021.129723
Final published version

A. O. Zamchiy
E. A. Baranov
I. E. Merkulova
I. V. Korolkov
V. I. Vdovin
A. K. Gutakovskii
V. A. Volodin

Original language	English
Article number	129723
Journal	Materials Letters
Volume	293
DOIs	https://doi.org/10.1016/j.matlet.2021.129723
Publication status	Published - 15 Jun 2021

Research areas

Aluminum-induced crystallization, Aluminum-induced layer exchange, Phase transformation, Polycrystalline silicon, Silicon suboxide, Thin films

OECD FOS+WOS

2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY
1.03.UK PHYSICS, CONDENSED MATTER
2.03 MECHANICAL ENGINEERING
2.03.IU ENGINEERING, MECHANICAL

ID: 28204037