Standard

Laser annealing of epitaxial CaF2 films on Si. / Dvurechenskii, A. V.; Smagina, Zh V.; Volodin, V. A. et al.

In: Thin Solid Films, Vol. 735, 138898, 01.10.2021.

Research output: Contribution to journal › Article › peer-review

Harvard

Dvurechenskii, AV, Smagina, ZV, Volodin, VA, Kacyuba, AV, Zinovyev, VA, Ivlev, GD & Prakopyeu, SL 2021, 'Laser annealing of epitaxial CaF2 films on Si', Thin Solid Films, vol. 735, 138898. https://doi.org/10.1016/j.tsf.2021.138898

APA

Dvurechenskii, A. V., Smagina, Z. V., Volodin, V. A., Kacyuba, A. V., Zinovyev, V. A., Ivlev, G. D., & Prakopyeu, S. L. (2021). Laser annealing of epitaxial CaF2 films on Si. Thin Solid Films, 735, [138898]. https://doi.org/10.1016/j.tsf.2021.138898

Vancouver

Dvurechenskii AV, Smagina ZV, Volodin VA, Kacyuba AV, Zinovyev VA, Ivlev GD et al. Laser annealing of epitaxial CaF2 films on Si. Thin Solid Films. 2021 Oct 1;735:138898. doi: 10.1016/j.tsf.2021.138898

Author

Dvurechenskii, A. V. ; Smagina, Zh V. ; Volodin, V. A. et al. / Laser annealing of epitaxial CaF2 films on Si. In: Thin Solid Films. 2021 ; Vol. 735.

BibTeX

@article{eaf3825661ed459c97b82ca1b094f1fd,
title = "Laser annealing of epitaxial CaF2 films on Si",
abstract = "Nanosecond time-resolved reflectivity and transmission changes in CaF2/Si(111) structures were measured to study the phase transitions, surface modification and radiolysis induced by nanosecond ruby laser pulses. The Si lattice heating up to the melting point leads to the nanohills formation on the surface of the structure, the height of which does not exceed 100 nm with the average base diameter of 360 nm and the surface density of 2•108cm– 2. The Raman scattering and energy-dispersive X-ray spectroscopy data indicate that the nanohills contain cavities inside them, and they are filled with the gas of Si2F6 molecules. The shell of the nanohills, obviously, consists of calcium oxide.",
keywords = "Calcium fluoride, Epitaxy, Laser annealing, Silicon",
author = "Dvurechenskii, {A. V.} and Smagina, {Zh V.} and Volodin, {V. A.} and Kacyuba, {A. V.} and Zinovyev, {V. A.} and Ivlev, {G. D.} and Prakopyeu, {S. L.}",
note = "Funding Information: The authors thank the NSU Multiple-access Center ?VTAN? for the provided measurements of Raman Spectra and ISP SB RAS Multiple-access Center ?Nano-structures? for the provision of measurement equipment EDX and SEM, and Yu. Zhivodkov for the analysis of the samples elemental content by energy dispersive X-ray spectroscopy, and A. Krupin for the structure preparation. Institutional review board statement: not applicable. Informed consent statement: not applicable. Data availability statement. The raw/processed data required to reproduce these findings cannot be shared at this time as the data also form part of the ongoing study. Funding Information: The reported study was funded by RFBR and ROSATOM, project number 20-21-00028. Publisher Copyright: {\textcopyright} 2021",
year = "2021",
month = oct,
day = "1",
doi = "10.1016/j.tsf.2021.138898",
language = "English",
volume = "735",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Laser annealing of epitaxial CaF2 films on Si

AU - Dvurechenskii, A. V.

AU - Smagina, Zh V.

AU - Volodin, V. A.

AU - Kacyuba, A. V.

AU - Zinovyev, V. A.

AU - Ivlev, G. D.

AU - Prakopyeu, S. L.

N1 - Funding Information: The authors thank the NSU Multiple-access Center ?VTAN? for the provided measurements of Raman Spectra and ISP SB RAS Multiple-access Center ?Nano-structures? for the provision of measurement equipment EDX and SEM, and Yu. Zhivodkov for the analysis of the samples elemental content by energy dispersive X-ray spectroscopy, and A. Krupin for the structure preparation. Institutional review board statement: not applicable. Informed consent statement: not applicable. Data availability statement. The raw/processed data required to reproduce these findings cannot be shared at this time as the data also form part of the ongoing study. Funding Information: The reported study was funded by RFBR and ROSATOM, project number 20-21-00028. Publisher Copyright: © 2021

PY - 2021/10/1

Y1 - 2021/10/1

N2 - Nanosecond time-resolved reflectivity and transmission changes in CaF2/Si(111) structures were measured to study the phase transitions, surface modification and radiolysis induced by nanosecond ruby laser pulses. The Si lattice heating up to the melting point leads to the nanohills formation on the surface of the structure, the height of which does not exceed 100 nm with the average base diameter of 360 nm and the surface density of 2•108cm– 2. The Raman scattering and energy-dispersive X-ray spectroscopy data indicate that the nanohills contain cavities inside them, and they are filled with the gas of Si2F6 molecules. The shell of the nanohills, obviously, consists of calcium oxide.

AB - Nanosecond time-resolved reflectivity and transmission changes in CaF2/Si(111) structures were measured to study the phase transitions, surface modification and radiolysis induced by nanosecond ruby laser pulses. The Si lattice heating up to the melting point leads to the nanohills formation on the surface of the structure, the height of which does not exceed 100 nm with the average base diameter of 360 nm and the surface density of 2•108cm– 2. The Raman scattering and energy-dispersive X-ray spectroscopy data indicate that the nanohills contain cavities inside them, and they are filled with the gas of Si2F6 molecules. The shell of the nanohills, obviously, consists of calcium oxide.

KW - Calcium fluoride

KW - Epitaxy

KW - Laser annealing

KW - Silicon

UR - http://www.scopus.com/inward/record.url?scp=85113481705&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2021.138898

DO - 10.1016/j.tsf.2021.138898

M3 - Article

AN - SCOPUS:85113481705

VL - 735

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

M1 - 138898

ER -

ID: 34082905