Standard

Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet. / Fedoseeva, Yu V.; Gorodetskiy, D. V.; Makarova, A. A. et al.

In: Journal of Structural Chemistry, Vol. 62, No. 1, 01.2021, p. 153-162.

Research output: Contribution to journal › Article › peer-review

Harvard

Fedoseeva, YV, Gorodetskiy, DV, Makarova, AA, Yudin, IB, Timoshenko, NI, Plotnikov, MY, Emelyanov, AA, Rebrov, AK & Okotrub, AV 2021, 'Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet', Journal of Structural Chemistry, vol. 62, no. 1, pp. 153-162. https://doi.org/10.1134/S0022476621010182

APA

Fedoseeva, Y. V., Gorodetskiy, D. V., Makarova, A. A., Yudin, I. B., Timoshenko, N. I., Plotnikov, M. Y., Emelyanov, A. A., Rebrov, A. K., & Okotrub, A. V. (2021). Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet. Journal of Structural Chemistry, 62(1), 153-162. https://doi.org/10.1134/S0022476621010182

Vancouver

Fedoseeva YV, Gorodetskiy DV, Makarova AA, Yudin IB, Timoshenko NI, Plotnikov MY et al. Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet. Journal of Structural Chemistry. 2021 Jan;62(1):153-162. doi: 10.1134/S0022476621010182

Author

Fedoseeva, Yu V. ; Gorodetskiy, D. V. ; Makarova, A. A. et al. / Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet. In: Journal of Structural Chemistry. 2021 ; Vol. 62, No. 1. pp. 153-162.

BibTeX

@article{f28511f9b4404c8d8eacf343aec99d63,
title = "Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet",
abstract = "We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.",
keywords = "chemical vapor deposition, diamond coatings, gas jet method, microwave plasma, NEXAFS, Raman spectroscopy, scanning electron microscopy, XPS",
author = "Fedoseeva, {Yu V.} and Gorodetskiy, {D. V.} and Makarova, {A. A.} and Yudin, {I. B.} and Timoshenko, {N. I.} and Plotnikov, {M. Yu} and Emelyanov, {A. A.} and Rebrov, {A. K.} and Okotrub, {A. V.}",
note = "Funding Information: The reported study was funded by RFBR, project number 18-29-19069. Publisher Copyright: {\textcopyright} 2021, Pleiades Publishing, Ltd. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",
year = "2021",
month = jan,
doi = "10.1134/S0022476621010182",
language = "English",
volume = "62",
pages = "153--162",
journal = "Journal of Structural Chemistry",
issn = "0022-4766",
publisher = "Springer GmbH & Co, Auslieferungs-Gesellschaf",
number = "1",

}

RIS

TY - JOUR

T1 - Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet

AU - Fedoseeva, Yu V.

AU - Gorodetskiy, D. V.

AU - Makarova, A. A.

AU - Yudin, I. B.

AU - Timoshenko, N. I.

AU - Plotnikov, M. Yu

AU - Emelyanov, A. A.

AU - Rebrov, A. K.

AU - Okotrub, A. V.

N1 - Funding Information: The reported study was funded by RFBR, project number 18-29-19069. Publisher Copyright: © 2021, Pleiades Publishing, Ltd. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.

PY - 2021/1

Y1 - 2021/1

N2 - We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.

AB - We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.

KW - chemical vapor deposition

KW - diamond coatings

KW - gas jet method

KW - microwave plasma

KW - NEXAFS

KW - Raman spectroscopy

KW - scanning electron microscopy

KW - XPS

UR - http://www.scopus.com/inward/record.url?scp=85100950529&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/9afc958a-b913-3631-8535-fbe4a7f91bc7/

U2 - 10.1134/S0022476621010182

DO - 10.1134/S0022476621010182

M3 - Article

AN - SCOPUS:85100950529

VL - 62

SP - 153

EP - 162

JO - Journal of Structural Chemistry

JF - Journal of Structural Chemistry

SN - 0022-4766

IS - 1

ER -

ID: 28004211