TY - JOUR

T1 - Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet

AU - Fedoseeva, Yu V.

AU - Gorodetskiy, D. V.

AU - Makarova, A. A.

AU - Yudin, I. B.

AU - Timoshenko, N. I.

AU - Plotnikov, M. Yu

AU - Emelyanov, A. A.

AU - Rebrov, A. K.

AU - Okotrub, A. V.

N1 - Funding Information: The reported study was funded by RFBR, project number 18-29-19069. Publisher Copyright: © 2021, Pleiades Publishing, Ltd. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.

PY - 2021/1

Y1 - 2021/1

N2 - We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.

AB - We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.

KW - chemical vapor deposition

KW - diamond coatings

KW - gas jet method

KW - microwave plasma

KW - NEXAFS

KW - Raman spectroscopy

KW - scanning electron microscopy

KW - XPS

UR - http://www.scopus.com/inward/record.url?scp=85100950529&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/9afc958a-b913-3631-8535-fbe4a7f91bc7/

U2 - 10.1134/S0022476621010182

DO - 10.1134/S0022476621010182

M3 - Article

AN - SCOPUS:85100950529

VL - 62

SP - 153

EP - 162

JO - Journal of Structural Chemistry

JF - Journal of Structural Chemistry

SN - 0022-4766

IS - 1

ER -