Research output: Contribution to journal › Article › peer-review
Influence of substrate nitridation conditions and buffer layer structures on the crack-free GaN layers on silicon substrate grown by ammonia-assisted molecular beam epitaxy. / Malin, Timur; Maidebura, Yan; Mansurov, Vladimir et al.
In: Thin Solid Films, Vol. 791, 140246, 29.02.2024.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Influence of substrate nitridation conditions and buffer layer structures on the crack-free GaN layers on silicon substrate grown by ammonia-assisted molecular beam epitaxy
AU - Malin, Timur
AU - Maidebura, Yan
AU - Mansurov, Vladimir
AU - Gavrilova, Tatyana
AU - Gutakovsky, Anton
AU - Vdovin, Vladimir
AU - Ponomarev, Sergey
AU - Loshkarev, Ivan
AU - Osinnykh, Igor
AU - Volodin, Vladimir
AU - Milakhin, Denis
AU - Zhuravlev, Konstantin
N1 - This work was supported by the Ministry of Science and Higher Education of the Russian Federation within the state task FWGW-2022-0015 “Ammonia molecular beam epitaxy of GaN heterostructures on silicon substrates for power and microwave transistors”.
PY - 2024/2/29
Y1 - 2024/2/29
N2 - It is shown that the nitridation conditions of the silicon substrate are not less important than the structure of the buffer layer in influencing the crack formation in GaN-on-Si layers grown by ammonia-assisted molecular beam epitaxy (NH3-MBE). Furthermore, the morphology of the GaN layers is independent of the buffer layer structure, but is determined by the GaN growth conditions. Nevertheless, the use of step-graded AlGaN buffer layers instead of a buffer layer with an inserted AlN layer leads to a higher crystalline quality of the crack-free GaN layers and to lower residual tensile stresses in them.
AB - It is shown that the nitridation conditions of the silicon substrate are not less important than the structure of the buffer layer in influencing the crack formation in GaN-on-Si layers grown by ammonia-assisted molecular beam epitaxy (NH3-MBE). Furthermore, the morphology of the GaN layers is independent of the buffer layer structure, but is determined by the GaN growth conditions. Nevertheless, the use of step-graded AlGaN buffer layers instead of a buffer layer with an inserted AlN layer leads to a higher crystalline quality of the crack-free GaN layers and to lower residual tensile stresses in them.
KW - Ammonia-assisted molecular beam epitaxy
KW - Biaxial stress
KW - Buffer structure
KW - Gallium nitride on silicon
KW - Silicon nitridation
KW - Surface cracks
UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85183999499&origin=inward&txGid=768c800b4afa33ecff53365d319f5832
UR - https://www.mendeley.com/catalogue/3bd42071-1601-39af-9a6f-a0a2ab8138a6/
U2 - 10.1016/j.tsf.2024.140246
DO - 10.1016/j.tsf.2024.140246
M3 - Article
VL - 791
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
M1 - 140246
ER -
ID: 61149819