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Hafnia and alumina stacks as UTBOXs in silicon-on insulator

Research output: Contribution to journal › Article › peer-review

Nano-Superconduction Laboratory

DOI

https://doi.org/10.1016/j.sse.2019.107734
Final published version

V. P. Popov
V. A. Antonov
A. K. Gutakovskiy
I. E. Tyschenko
V. I. Vdovin
A. V. Miakonkikh
K. V. Rudenko

Original language	English
Article number	107734
Number of pages	7
Journal	Solid-State Electronics
Volume	168
DOIs	https://doi.org/10.1016/j.sse.2019.107734
Publication status	Published - Jun 2020

OECD FOS+WOS

Research areas

Ferroelectric phase, Hafnia and alumina high-k BOX, Interface polarization, Interface states, SOI pseudo-MOSFETs, SOS

ID: 23093130