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Gas-dynamic sources of cluster ions for basic and applied research. / Ieshkin, A. E.; Tolstoguzov, A. B.; Коробейщиков, Николай Геннадьевич et al.

In: Physics-Uspekhi, Vol. 65, No. 7, 15.07.2022, p. 677-705.

Research output: Contribution to journal › Article › peer-review

Harvard

Ieshkin, AE, Tolstoguzov, AB, Коробейщиков, НГ, Pelenovich, V & Chernysh, V 2022, 'Gas-dynamic sources of cluster ions for basic and applied research', Physics-Uspekhi, vol. 65, no. 7, pp. 677-705. https://doi.org/10.3367/UFNe.2021.06.038994

APA

Ieshkin, A. E., Tolstoguzov, A. B., Коробейщиков, Н. Г., Pelenovich, V., & Chernysh, V. (2022). Gas-dynamic sources of cluster ions for basic and applied research. Physics-Uspekhi, 65(7), 677-705. https://doi.org/10.3367/UFNe.2021.06.038994

Vancouver

Ieshkin AE, Tolstoguzov AB, Коробейщиков НГ, Pelenovich V, Chernysh V. Gas-dynamic sources of cluster ions for basic and applied research. Physics-Uspekhi. 2022 Jul 15;65(7):677-705. doi: 10.3367/UFNe.2021.06.038994

Author

Ieshkin, A. E. ; Tolstoguzov, A. B. ; Коробейщиков, Николай Геннадьевич et al. / Gas-dynamic sources of cluster ions for basic and applied research. In: Physics-Uspekhi. 2022 ; Vol. 65, No. 7. pp. 677-705.

BibTeX

@article{b6fa2ac372cc46dca36a9643bd4c1edc,
title = "Gas-dynamic sources of cluster ions for basic and applied research",
abstract = "State of the art in the development and application of gas cluster ion sources is considered. The mechanisms of neutral cluster formation, the techniques applied to study their flows and regularities of ionization and the principles of mass separation of ion beams are discussed. Design features of some cluster ion beam sources intended for various applied and academic studies are considered. Use of such sources for controlled modification of surface topography, ultra-shallow ion implantation, development of analytical techniques, and stimulation of surface chemical reactions is analyzed.",
author = "Ieshkin, {A. E.} and Tolstoguzov, {A. B.} and Коробейщиков, {Николай Геннадьевич} and V. Pelenovich and Vladimir Chernysh",
note = "Иешкин А.Е., Толстогузов А.Б., Коробейщиков Н.Г., Пеленович В.О., Черныш В.С. Газодинамические источники кластерных ионов для решения фундаментальных и прикладных задач // Успехи физических наук. – 2022. – Т. 192. – № 7. – С. 722-753. Работа поддержана РФФИ в рамках научного проекта No. 20-18-50253.",
year = "2022",
month = jul,
day = "15",
doi = "10.3367/UFNe.2021.06.038994",
language = "English",
volume = "65",
pages = "677--705",
journal = "Physics-Uspekhi",
issn = "1063-7869",
publisher = "Turpion Ltd.",
number = "7",

}

RIS

TY - JOUR

T1 - Gas-dynamic sources of cluster ions for basic and applied research

AU - Ieshkin, A. E.

AU - Tolstoguzov, A. B.

AU - Коробейщиков, Николай Геннадьевич

AU - Pelenovich, V.

AU - Chernysh, Vladimir

N1 - Иешкин А.Е., Толстогузов А.Б., Коробейщиков Н.Г., Пеленович В.О., Черныш В.С. Газодинамические источники кластерных ионов для решения фундаментальных и прикладных задач // Успехи физических наук. – 2022. – Т. 192. – № 7. – С. 722-753. Работа поддержана РФФИ в рамках научного проекта No. 20-18-50253.

PY - 2022/7/15

Y1 - 2022/7/15

N2 - State of the art in the development and application of gas cluster ion sources is considered. The mechanisms of neutral cluster formation, the techniques applied to study their flows and regularities of ionization and the principles of mass separation of ion beams are discussed. Design features of some cluster ion beam sources intended for various applied and academic studies are considered. Use of such sources for controlled modification of surface topography, ultra-shallow ion implantation, development of analytical techniques, and stimulation of surface chemical reactions is analyzed.

AB - State of the art in the development and application of gas cluster ion sources is considered. The mechanisms of neutral cluster formation, the techniques applied to study their flows and regularities of ionization and the principles of mass separation of ion beams are discussed. Design features of some cluster ion beam sources intended for various applied and academic studies are considered. Use of such sources for controlled modification of surface topography, ultra-shallow ion implantation, development of analytical techniques, and stimulation of surface chemical reactions is analyzed.

UR - https://www.mendeley.com/catalogue/e397f528-27da-382e-bec8-c81536f95b1b/

U2 - 10.3367/UFNe.2021.06.038994

DO - 10.3367/UFNe.2021.06.038994

M3 - Article

VL - 65

SP - 677

EP - 705

JO - Physics-Uspekhi

JF - Physics-Uspekhi

SN - 1063-7869

IS - 7

ER -

ID: 38519426