Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Gas-dynamic sources of cluster ions for basic and applied research. / Ieshkin, A. E.; Tolstoguzov, A. B.; Коробейщиков, Николай Геннадьевич и др.
в: Physics-Uspekhi, Том 65, № 7, 15.07.2022, стр. 677-705.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Gas-dynamic sources of cluster ions for basic and applied research
AU - Ieshkin, A. E.
AU - Tolstoguzov, A. B.
AU - Коробейщиков, Николай Геннадьевич
AU - Pelenovich, V.
AU - Chernysh, Vladimir
N1 - Иешкин А.Е., Толстогузов А.Б., Коробейщиков Н.Г., Пеленович В.О., Черныш В.С. Газодинамические источники кластерных ионов для решения фундаментальных и прикладных задач // Успехи физических наук. – 2022. – Т. 192. – № 7. – С. 722-753. Работа поддержана РФФИ в рамках научного проекта No. 20-18-50253.
PY - 2022/7/15
Y1 - 2022/7/15
N2 - State of the art in the development and application of gas cluster ion sources is considered. The mechanisms of neutral cluster formation, the techniques applied to study their flows and regularities of ionization and the principles of mass separation of ion beams are discussed. Design features of some cluster ion beam sources intended for various applied and academic studies are considered. Use of such sources for controlled modification of surface topography, ultra-shallow ion implantation, development of analytical techniques, and stimulation of surface chemical reactions is analyzed.
AB - State of the art in the development and application of gas cluster ion sources is considered. The mechanisms of neutral cluster formation, the techniques applied to study their flows and regularities of ionization and the principles of mass separation of ion beams are discussed. Design features of some cluster ion beam sources intended for various applied and academic studies are considered. Use of such sources for controlled modification of surface topography, ultra-shallow ion implantation, development of analytical techniques, and stimulation of surface chemical reactions is analyzed.
UR - https://www.mendeley.com/catalogue/e397f528-27da-382e-bec8-c81536f95b1b/
U2 - 10.3367/UFNe.2021.06.038994
DO - 10.3367/UFNe.2021.06.038994
M3 - Article
VL - 65
SP - 677
EP - 705
JO - Physics-Uspekhi
JF - Physics-Uspekhi
SN - 1063-7869
IS - 7
ER -
ID: 38519426