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Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam : 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf. / Сковородко, Петр Алексеевич; Шарафутдинов , Р.Г.; Щукин, В.Г. et al.

2012. 193 Paper presented at 28th International Symposium on Rarefied Gas Dynamics, Zaragoza, Spain.

Research output: Contribution to conference › Paper › peer-review

Harvard

Сковородко, ПА, Шарафутдинов , РГ, Щукин, ВГ & Константинов , ВО 2012, 'Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam: 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf.', Paper presented at 28th International Symposium on Rarefied Gas Dynamics, Zaragoza, Spain, 09.07.2012 - 13.07.2012 pp. 193.

APA

Сковородко, П. А., Шарафутдинов , Р. Г., Щукин, В. Г., & Константинов , В. О. (2012). Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam: 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf.. 193. Paper presented at 28th International Symposium on Rarefied Gas Dynamics, Zaragoza, Spain.

Vancouver

Сковородко ПА, Шарафутдинов РГ, Щукин ВГ, Константинов ВО. Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam: 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf.. 2012. Paper presented at 28th International Symposium on Rarefied Gas Dynamics, Zaragoza, Spain.

Author

Сковородко, Петр Алексеевич ; Шарафутдинов , Р.Г. ; Щукин, В.Г. et al. / Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam : 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf. Paper presented at 28th International Symposium on Rarefied Gas Dynamics, Zaragoza, Spain.1 p.

BibTeX

@conference{8d295ccdf61948b79f5cf113a151d72a,
title = "Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam: 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf.",
author = "Сковородко, {Петр Алексеевич} and Р.Г. Шарафутдинов and В.Г. Щукин and В.О. Константинов",
year = "2012",
language = "English",
pages = "193",
note = "28th International Symposium on Rarefied Gas Dynamics ; Conference date: 09-07-2012 Through 13-07-2012",

}

RIS

TY - CONF

T1 - Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam

T2 - 28th International Symposium on Rarefied Gas Dynamics

AU - Сковородко, Петр Алексеевич

AU - Шарафутдинов , Р.Г.

AU - Щукин, В.Г.

AU - Константинов , В.О.

PY - 2012

Y1 - 2012

UR - https://www.proceedings.com/content/021/021537webtoc.pdf

M3 - Paper

SP - 193

Y2 - 9 July 2012 through 13 July 2012

ER -

ID: 27282991