Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam

Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam: 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf.

Research output: Contribution to conference › Paper › peer-review

Original language	English
Pages	193
Number of pages	1
Publication status	Published - 2012
Event	28th International Symposium on Rarefied Gas Dynamics - Zaragoza, Spain Duration: 9 Jul 2012 → 13 Jul 2012

Conference	28th International Symposium on Rarefied Gas Dynamics
Country/Territory	Spain
City	Zaragoza
Period	09.07.2012 → 13.07.2012

ID: 27282991