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Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography. / Utkin, Dmitriy; Shklyev, Alexander; Tsarev, Andrey et al.

In: Physics Procedia, Vol. 86, 01.01.2017, p. 127-130.

Research output: Contribution to journal › Conference article › peer-review

Harvard

Utkin, D, Shklyev, A, Tsarev, A, Latyshev, A & Nasimov, D 2017, 'Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography', Physics Procedia, vol. 86, pp. 127-130. https://doi.org/10.1016/j.phpro.2017.01.033

APA

Utkin, D., Shklyev, A., Tsarev, A., Latyshev, A., & Nasimov, D. (2017). Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography. Physics Procedia, 86, 127-130. https://doi.org/10.1016/j.phpro.2017.01.033

Vancouver

Utkin D, Shklyev A, Tsarev A, Latyshev A, Nasimov D. Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography. Physics Procedia. 2017 Jan 1;86:127-130. doi: 10.1016/j.phpro.2017.01.033

Author

Utkin, Dmitriy ; Shklyev, Alexander ; Tsarev, Andrey et al. / Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography. In: Physics Procedia. 2017 ; Vol. 86. pp. 127-130.

BibTeX

@article{af2f9ed97a934255968b70767bd05e52,
title = "Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography",
abstract = "The formation of the periodic structures based on Si-materials by electron beam lithography technique has been studied. We have investigated lithography processes such as designing, exposition, development, etching end others. The developed technique allows forming close-packed arrays of elements and holes in the nanometre range. This can be used to produce two-dimensional photonic crystals (2D PhCs) with emitting micro cavities (missing holes) with lateral size parameters within an accuracy of about 2% in the Si (100) substrate and in silicon-on-insulator structures. Such accuracy is expected to be sufficient for obtaining the cavities-coupling radiation interference from large areas of 2D PhCs.",
keywords = "EBL lithography, nanostructers, photonic crystals",
author = "Dmitriy Utkin and Alexander Shklyev and Andrey Tsarev and Alexander Latyshev and Dmitriy Nasimov",
year = "2017",
month = jan,
day = "1",
doi = "10.1016/j.phpro.2017.01.033",
language = "English",
volume = "86",
pages = "127--130",
journal = "Physics Procedia",
issn = "1875-3884",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography

AU - Utkin, Dmitriy

AU - Shklyev, Alexander

AU - Tsarev, Andrey

AU - Latyshev, Alexander

AU - Nasimov, Dmitriy

PY - 2017/1/1

Y1 - 2017/1/1

N2 - The formation of the periodic structures based on Si-materials by electron beam lithography technique has been studied. We have investigated lithography processes such as designing, exposition, development, etching end others. The developed technique allows forming close-packed arrays of elements and holes in the nanometre range. This can be used to produce two-dimensional photonic crystals (2D PhCs) with emitting micro cavities (missing holes) with lateral size parameters within an accuracy of about 2% in the Si (100) substrate and in silicon-on-insulator structures. Such accuracy is expected to be sufficient for obtaining the cavities-coupling radiation interference from large areas of 2D PhCs.

AB - The formation of the periodic structures based on Si-materials by electron beam lithography technique has been studied. We have investigated lithography processes such as designing, exposition, development, etching end others. The developed technique allows forming close-packed arrays of elements and holes in the nanometre range. This can be used to produce two-dimensional photonic crystals (2D PhCs) with emitting micro cavities (missing holes) with lateral size parameters within an accuracy of about 2% in the Si (100) substrate and in silicon-on-insulator structures. Such accuracy is expected to be sufficient for obtaining the cavities-coupling radiation interference from large areas of 2D PhCs.

KW - EBL lithography

KW - nanostructers

KW - photonic crystals

UR - http://www.scopus.com/inward/record.url?scp=85017364897&partnerID=8YFLogxK

U2 - 10.1016/j.phpro.2017.01.033

DO - 10.1016/j.phpro.2017.01.033

M3 - Conference article

AN - SCOPUS:85017364897

VL - 86

SP - 127

EP - 130

JO - Physics Procedia

JF - Physics Procedia

SN - 1875-3884

ER -

ID: 10264169