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Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography

Research output: Contribution to journal › Conference article › peer-review

DOI

https://doi.org/10.1016/j.phpro.2017.01.033
Final published version

Dmitriy Utkin
Alexander Shklyev
Andrey Tsarev
Alexander Latyshev
Dmitriy Nasimov

Original language	English
Pages (from-to)	127-130
Number of pages	4
Journal	Physics Procedia
Volume	86
DOIs	https://doi.org/10.1016/j.phpro.2017.01.033
Publication status	Published - 1 Jan 2017

Research areas

EBL lithography, nanostructers, photonic crystals

OECD FOS+WOS

ID: 10264169