TY - JOUR

T1 - Formation of Periodic Structures (2D-PhCs) by Scanning Electron Lithography

AU - Utkin, Dmitriy

AU - Shklyev, Alexander

AU - Tsarev, Andrey

AU - Latyshev, Alexander

AU - Nasimov, Dmitriy

PY - 2017/1/1

Y1 - 2017/1/1

N2 - The formation of the periodic structures based on Si-materials by electron beam lithography technique has been studied. We have investigated lithography processes such as designing, exposition, development, etching end others. The developed technique allows forming close-packed arrays of elements and holes in the nanometre range. This can be used to produce two-dimensional photonic crystals (2D PhCs) with emitting micro cavities (missing holes) with lateral size parameters within an accuracy of about 2% in the Si (100) substrate and in silicon-on-insulator structures. Such accuracy is expected to be sufficient for obtaining the cavities-coupling radiation interference from large areas of 2D PhCs.

AB - The formation of the periodic structures based on Si-materials by electron beam lithography technique has been studied. We have investigated lithography processes such as designing, exposition, development, etching end others. The developed technique allows forming close-packed arrays of elements and holes in the nanometre range. This can be used to produce two-dimensional photonic crystals (2D PhCs) with emitting micro cavities (missing holes) with lateral size parameters within an accuracy of about 2% in the Si (100) substrate and in silicon-on-insulator structures. Such accuracy is expected to be sufficient for obtaining the cavities-coupling radiation interference from large areas of 2D PhCs.

KW - EBL lithography

KW - nanostructers

KW - photonic crystals

UR - http://www.scopus.com/inward/record.url?scp=85017364897&partnerID=8YFLogxK

U2 - 10.1016/j.phpro.2017.01.033

DO - 10.1016/j.phpro.2017.01.033

M3 - Conference article

AN - SCOPUS:85017364897

VL - 86

SP - 127

EP - 130

JO - Physics Procedia

JF - Physics Procedia

SN - 1875-3884

ER -