Research output: Contribution to journal › Article › peer-review
Formation of irregular morphology on nanostructured surface by gas cluster ion beam. / Pelenovich, Vasiliy; Zeng, Xiaomei; Zuo, Wenbin et al.
In: Vacuum, Vol. 182, 109705, 01.12.2020.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Formation of irregular morphology on nanostructured surface by gas cluster ion beam
AU - Pelenovich, Vasiliy
AU - Zeng, Xiaomei
AU - Zuo, Wenbin
AU - Tolstogouzov, Alexander
AU - Korobeishchikov, Nikolay
AU - Fu, Dejun
AU - Yang, Bing
PY - 2020/12/1
Y1 - 2020/12/1
N2 - Ar1000 cluster ion beam was used to fabricate irregular structures of a micrometer scale on the surface of pressed Si powder of 60 nm nanoparticles (NPs). The average density of the target material played an important role in the surface features formation. The samples with lower average density, i.e. with larger distance between adjacent NPs demonstrated more developed surface morphology, which implied an importance of the degree of freedom of NP and its beam induced mobility in formation of the surface features. At higher average density a process of particle erosion was accompanied by the debris formation, which filled the gaps between the NPs, blocked the particle mobility, and, eventually, resulted in conventional smoothing effect.
AB - Ar1000 cluster ion beam was used to fabricate irregular structures of a micrometer scale on the surface of pressed Si powder of 60 nm nanoparticles (NPs). The average density of the target material played an important role in the surface features formation. The samples with lower average density, i.e. with larger distance between adjacent NPs demonstrated more developed surface morphology, which implied an importance of the degree of freedom of NP and its beam induced mobility in formation of the surface features. At higher average density a process of particle erosion was accompanied by the debris formation, which filled the gaps between the NPs, blocked the particle mobility, and, eventually, resulted in conventional smoothing effect.
KW - Gas cluster ion beam
KW - Si nanopowder
KW - Smoothing effect
KW - Surface nanostructures
KW - BOMBARDMENT
UR - http://www.scopus.com/inward/record.url?scp=85089531562&partnerID=8YFLogxK
U2 - 10.1016/j.vacuum.2020.109705
DO - 10.1016/j.vacuum.2020.109705
M3 - Article
AN - SCOPUS:85089531562
VL - 182
JO - Vacuum
JF - Vacuum
SN - 0042-207X
M1 - 109705
ER -
ID: 24984532