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Formation of irregular morphology on nanostructured surface by gas cluster ion beam. / Pelenovich, Vasiliy; Zeng, Xiaomei; Zuo, Wenbin et al.

In: Vacuum, Vol. 182, 109705, 01.12.2020.

Research output: Contribution to journal › Article › peer-review

Harvard

Pelenovich, V, Zeng, X, Zuo, W, Tolstogouzov, A, Korobeishchikov, N, Fu, D & Yang, B 2020, 'Formation of irregular morphology on nanostructured surface by gas cluster ion beam', Vacuum, vol. 182, 109705. https://doi.org/10.1016/j.vacuum.2020.109705

APA

Pelenovich, V., Zeng, X., Zuo, W., Tolstogouzov, A., Korobeishchikov, N., Fu, D., & Yang, B. (2020). Formation of irregular morphology on nanostructured surface by gas cluster ion beam. Vacuum, 182, [109705]. https://doi.org/10.1016/j.vacuum.2020.109705

Vancouver

Pelenovich V, Zeng X, Zuo W, Tolstogouzov A, Korobeishchikov N, Fu D et al. Formation of irregular morphology on nanostructured surface by gas cluster ion beam. Vacuum. 2020 Dec 1;182:109705. doi: 10.1016/j.vacuum.2020.109705

Author

Pelenovich, Vasiliy ; Zeng, Xiaomei ; Zuo, Wenbin et al. / Formation of irregular morphology on nanostructured surface by gas cluster ion beam. In: Vacuum. 2020 ; Vol. 182.

BibTeX

@article{2686ccd607894350bf806106d69f8fd2,
title = "Formation of irregular morphology on nanostructured surface by gas cluster ion beam",
abstract = "Ar1000 cluster ion beam was used to fabricate irregular structures of a micrometer scale on the surface of pressed Si powder of 60 nm nanoparticles (NPs). The average density of the target material played an important role in the surface features formation. The samples with lower average density, i.e. with larger distance between adjacent NPs demonstrated more developed surface morphology, which implied an importance of the degree of freedom of NP and its beam induced mobility in formation of the surface features. At higher average density a process of particle erosion was accompanied by the debris formation, which filled the gaps between the NPs, blocked the particle mobility, and, eventually, resulted in conventional smoothing effect.",
keywords = "Gas cluster ion beam, Si nanopowder, Smoothing effect, Surface nanostructures, BOMBARDMENT",
author = "Vasiliy Pelenovich and Xiaomei Zeng and Wenbin Zuo and Alexander Tolstogouzov and Nikolay Korobeishchikov and Dejun Fu and Bing Yang",
year = "2020",
month = dec,
day = "1",
doi = "10.1016/j.vacuum.2020.109705",
language = "English",
volume = "182",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Ltd",

}

RIS

TY - JOUR

T1 - Formation of irregular morphology on nanostructured surface by gas cluster ion beam

AU - Pelenovich, Vasiliy

AU - Zeng, Xiaomei

AU - Zuo, Wenbin

AU - Tolstogouzov, Alexander

AU - Korobeishchikov, Nikolay

AU - Fu, Dejun

AU - Yang, Bing

PY - 2020/12/1

Y1 - 2020/12/1

N2 - Ar1000 cluster ion beam was used to fabricate irregular structures of a micrometer scale on the surface of pressed Si powder of 60 nm nanoparticles (NPs). The average density of the target material played an important role in the surface features formation. The samples with lower average density, i.e. with larger distance between adjacent NPs demonstrated more developed surface morphology, which implied an importance of the degree of freedom of NP and its beam induced mobility in formation of the surface features. At higher average density a process of particle erosion was accompanied by the debris formation, which filled the gaps between the NPs, blocked the particle mobility, and, eventually, resulted in conventional smoothing effect.

AB - Ar1000 cluster ion beam was used to fabricate irregular structures of a micrometer scale on the surface of pressed Si powder of 60 nm nanoparticles (NPs). The average density of the target material played an important role in the surface features formation. The samples with lower average density, i.e. with larger distance between adjacent NPs demonstrated more developed surface morphology, which implied an importance of the degree of freedom of NP and its beam induced mobility in formation of the surface features. At higher average density a process of particle erosion was accompanied by the debris formation, which filled the gaps between the NPs, blocked the particle mobility, and, eventually, resulted in conventional smoothing effect.

KW - Gas cluster ion beam

KW - Si nanopowder

KW - Smoothing effect

KW - Surface nanostructures

KW - BOMBARDMENT

UR - http://www.scopus.com/inward/record.url?scp=85089531562&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2020.109705

DO - 10.1016/j.vacuum.2020.109705

M3 - Article

AN - SCOPUS:85089531562

VL - 182

JO - Vacuum

JF - Vacuum

SN - 0042-207X

M1 - 109705

ER -

ID: 24984532