Formation of germanium nanocrystals and amorphous nanoclusters in GeSiOx films using electron beam annealing › Research Explorer

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Formation of germanium nanocrystals and amorphous nanoclusters in GeSiO_x films using electron beam annealing

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1016/j.vacuum.2021.110796
Final published version

Fan Zhang
V. A. Volodin
E. A. Baranov
V. O. Konstantinov
V. G. Shchukin
A. O. Zamchiy
M. Vergnat

Original language	English
Article number	110796
Journal	Vacuum
Volume	197
DOIs	https://doi.org/10.1016/j.vacuum.2021.110796
Publication status	Published - Mar 2022

OECD FOS+WOS

2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY

Research areas

Electron beam annealing, Films of nonstoichiometric germanium silicate glass, Nanoclusters and germanium nanocrystals

ID: 34986312