Formation of Germanium Nanocrystals and Amorphous Nanoclusters in GeO[SiO] and GeO[SiO2] Films Using Electron Beam Annealing › Research Explorer

DOI

https://doi.org/10.1134/S1063784224030162
Final published version

V. O. Konstantinov
E. A. Baranov
Zhang Fan
V. G. Shchukin
A. O. Zamchiy
V. A. Volodin

Original language	English
Pages (from-to)	898-905
Number of pages	8
Journal	Technical Physics
Volume	69
Issue number	4
DOIs	https://doi.org/10.1134/S1063784224030162
Publication status	Published - 18 Sept 2024

OECD FOS+WOS

1.03.UB PHYSICS, APPLIED

Research areas

electron beam annealing, films of nonstoichiometric germanosilicate glass, germanium nano clusters and nano crystals

ID: 61204213