Focus Probe Technique for Edge Detection and Linewidth Measurement of Microstructures with Nanometer Resolution. / Fan, Kuang Chao; Lin, Chi Duen; Li, Ruijun et al.
In: Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao, Vol. 38, No. 3, 01.06.2017, p. 253-260.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Focus Probe Technique for Edge Detection and Linewidth Measurement of Microstructures with Nanometer Resolution
AU - Fan, Kuang Chao
AU - Lin, Chi Duen
AU - Li, Ruijun
AU - Chen, Liang Chia
AU - Chugui, Yuri
PY - 2017/6/1
Y1 - 2017/6/1
N2 - The edge detection of micro/nano-scaled microstructures is difficult to achieve by conventional microscopes due to the sensitivity to the property of measured surface and the effect of diffraction limit. This paper presents a new technique by using a blue-ray DVD pick-up head as the focus sensor in association with a nanopositioning stage. The measurement method of edge detection is based on the principle of total reflection energy. The total reflection energy will be maximal when the substrate surface is on the focus point of the probe. It will be gradually reduced when the focused beam scans across the edge. From the theoretical analysis, the edge position is found right on the centerline of the focused beam and this position can be directly detected by the nanopositioning stage to the resolution of 1 nm. Experimental results show that the uncertainty of measured edge position and linewidth are all within ±35 nm (±2σ). The proposed technique is simple in principle and easy to setup. This technique can overcome the conventional diffraction limit of optical microscope and is possible for in-situ measurement.
AB - The edge detection of micro/nano-scaled microstructures is difficult to achieve by conventional microscopes due to the sensitivity to the property of measured surface and the effect of diffraction limit. This paper presents a new technique by using a blue-ray DVD pick-up head as the focus sensor in association with a nanopositioning stage. The measurement method of edge detection is based on the principle of total reflection energy. The total reflection energy will be maximal when the substrate surface is on the focus point of the probe. It will be gradually reduced when the focused beam scans across the edge. From the theoretical analysis, the edge position is found right on the centerline of the focused beam and this position can be directly detected by the nanopositioning stage to the resolution of 1 nm. Experimental results show that the uncertainty of measured edge position and linewidth are all within ±35 nm (±2σ). The proposed technique is simple in principle and easy to setup. This technique can overcome the conventional diffraction limit of optical microscope and is possible for in-situ measurement.
KW - Edge detection
KW - Focus probe
KW - Linewidth
KW - Microstructure
KW - METROLOGY
KW - OPTICAL-MICROSCOPE
UR - http://www.scopus.com/inward/record.url?scp=85034946765&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:85034946765
VL - 38
SP - 253
EP - 260
JO - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
JF - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
SN - 0257-9731
IS - 3
ER -
ID: 25348491