TY - JOUR

T1 - Focus Probe Technique for Edge Detection and Linewidth Measurement of Microstructures with Nanometer Resolution

AU - Fan, Kuang Chao

AU - Lin, Chi Duen

AU - Li, Ruijun

AU - Chen, Liang Chia

AU - Chugui, Yuri

PY - 2017/6/1

Y1 - 2017/6/1

N2 - The edge detection of micro/nano-scaled microstructures is difficult to achieve by conventional microscopes due to the sensitivity to the property of measured surface and the effect of diffraction limit. This paper presents a new technique by using a blue-ray DVD pick-up head as the focus sensor in association with a nanopositioning stage. The measurement method of edge detection is based on the principle of total reflection energy. The total reflection energy will be maximal when the substrate surface is on the focus point of the probe. It will be gradually reduced when the focused beam scans across the edge. From the theoretical analysis, the edge position is found right on the centerline of the focused beam and this position can be directly detected by the nanopositioning stage to the resolution of 1 nm. Experimental results show that the uncertainty of measured edge position and linewidth are all within ±35 nm (±2σ). The proposed technique is simple in principle and easy to setup. This technique can overcome the conventional diffraction limit of optical microscope and is possible for in-situ measurement.

AB - The edge detection of micro/nano-scaled microstructures is difficult to achieve by conventional microscopes due to the sensitivity to the property of measured surface and the effect of diffraction limit. This paper presents a new technique by using a blue-ray DVD pick-up head as the focus sensor in association with a nanopositioning stage. The measurement method of edge detection is based on the principle of total reflection energy. The total reflection energy will be maximal when the substrate surface is on the focus point of the probe. It will be gradually reduced when the focused beam scans across the edge. From the theoretical analysis, the edge position is found right on the centerline of the focused beam and this position can be directly detected by the nanopositioning stage to the resolution of 1 nm. Experimental results show that the uncertainty of measured edge position and linewidth are all within ±35 nm (±2σ). The proposed technique is simple in principle and easy to setup. This technique can overcome the conventional diffraction limit of optical microscope and is possible for in-situ measurement.

KW - Edge detection

KW - Focus probe

KW - Linewidth

KW - Microstructure

KW - METROLOGY

KW - OPTICAL-MICROSCOPE

UR - http://www.scopus.com/inward/record.url?scp=85034946765&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:85034946765

VL - 38

SP - 253

EP - 260

JO - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

JF - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

SN - 0257-9731

IS - 3

ER -