Research output: Contribution to journal › Conference article › peer-review
| Original language | English |
|---|---|
| Article number | 012060 |
| Number of pages | 5 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1313 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 12 Sept 2019 |
| Event | 26th International Conference on Vacuum Technique and Technology, VTT 2019 - Saint Petersburg, Russian Federation Duration: 18 Jun 2019 → 20 Jun 2019 |
ID: 21927860