Original languageEnglish
Article number012060
Number of pages5
JournalJournal of Physics: Conference Series
Volume1313
Issue number1
DOIs
Publication statusPublished - 12 Sept 2019
Event26th International Conference on Vacuum Technique and Technology - СПбГЭТУ "ЛЭТИ", Saint Petersburg, Russian Federation
Duration: 18 Jun 201920 Jun 2019
Conference number: 26

    OECD FOS+WOS

    Research areas

  • FRAGMENTATION

ID: 21927860