Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide › Research Explorer

DOI

https://doi.org/10.1016/j.vacuum.2021.110462
Final published version

A. O. Zamchiy
E. A. Baranov
S. V. Starinskiy
N. A. Lunev
I. E. Merkulova

Original language	English
Article number	110462
Journal	Vacuum
Volume	192
DOIs	https://doi.org/10.1016/j.vacuum.2021.110462
Publication status	Published - Oct 2021

OECD FOS+WOS

2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY

Research areas

Gold-induced crystallization, Phase transformation, Polycrystalline silicon, Silicon suboxide, Thin films

ID: 29130062