Research output: Contribution to journal › Article › peer-review
Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide. / Zamchiy, A. O.; Baranov, E. A.; Starinskiy, S. V. et al.
In: Vacuum, Vol. 192, 110462, 10.2021.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide
AU - Zamchiy, A. O.
AU - Baranov, E. A.
AU - Starinskiy, S. V.
AU - Lunev, N. A.
AU - Merkulova, I. E.
N1 - Funding Information: This study was financially supported by the Russian Science Foundation, project # 19-79-10143. Raman and TEM studies were performed using the equipment of the Center of collective usage ‘‘VTAN” in the ATRC department of NSU. The authors are grateful to G.K. Krivyakin for carrying out the TEM investigation of samples. Publisher Copyright: © 2021 Elsevier Ltd
PY - 2021/10
Y1 - 2021/10
N2 - In this work, polycrystalline silicon (poly-Si) thin films were synthesized using Au-induced crystallization of amorphous silicon suboxide for the first time. The structure and elemental composition of the substrate/Au/a-SiO0.4 stacked structure annealed at 500–700°C were investigated by transmission electron microscopy (TEM), Raman, and energy-dispersive X-ray spectroscopy (EDX). TEM and Raman methods confirmed the formation of a poly-Si thin film in the bottom layer (on the substrate) as a result of annealing. At the same time, TEM and EDX studies showed the formation of a thin (barrier) SiO2 layer with a thickness of ~5 nm located between the poly-Si thin film and the upper layer consisting of Au, Si, and O. Based on the results, a mechanism for the growth of poly-Si thin films is proposed which has features (dewetting of Au films and formation of a barrier SiO2 layer) that are not characteristic of the well-known layer exchange process.
AB - In this work, polycrystalline silicon (poly-Si) thin films were synthesized using Au-induced crystallization of amorphous silicon suboxide for the first time. The structure and elemental composition of the substrate/Au/a-SiO0.4 stacked structure annealed at 500–700°C were investigated by transmission electron microscopy (TEM), Raman, and energy-dispersive X-ray spectroscopy (EDX). TEM and Raman methods confirmed the formation of a poly-Si thin film in the bottom layer (on the substrate) as a result of annealing. At the same time, TEM and EDX studies showed the formation of a thin (barrier) SiO2 layer with a thickness of ~5 nm located between the poly-Si thin film and the upper layer consisting of Au, Si, and O. Based on the results, a mechanism for the growth of poly-Si thin films is proposed which has features (dewetting of Au films and formation of a barrier SiO2 layer) that are not characteristic of the well-known layer exchange process.
KW - Gold-induced crystallization
KW - Phase transformation
KW - Polycrystalline silicon
KW - Silicon suboxide
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85110464730&partnerID=8YFLogxK
U2 - 10.1016/j.vacuum.2021.110462
DO - 10.1016/j.vacuum.2021.110462
M3 - Article
AN - SCOPUS:85110464730
VL - 192
JO - Vacuum
JF - Vacuum
SN - 0042-207X
M1 - 110462
ER -
ID: 29130062