Research output: Contribution to journal › Article › peer-review
Electronic structure and charge transport in nonstoichiometric tantalum oxide. / Perevalov, T. V.; Gritsenko, V. A.; Gismatulin, A. A. et al.
In: Nanotechnology, Vol. 29, No. 26, 264001, 29.06.2018.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Electronic structure and charge transport in nonstoichiometric tantalum oxide
AU - Perevalov, T. V.
AU - Gritsenko, V. A.
AU - Gismatulin, A. A.
AU - Voronkovskii, V. A.
AU - Gerasimova, A. K.
AU - Aliev, V. Sh
AU - Prosvirin, I. A.
PY - 2018/6/29
Y1 - 2018/6/29
N2 - The atomic and electronic structure of nonstoichiometric oxygen-deficient tantalum oxide TaOx<2.5 grown by ion beam sputtering deposition was studied. The TaOx film content was analyzed by x-ray photoelectron spectroscopy and by quantum-chemistry simulation. TaOx is composed of Ta2O5, metallic tantalum clusters and tantalum suboxides. A method for evaluating the stoichiometry parameter of TaOx from the comparison of experimental and theoretical photoelectron valence band spectra is proposed. The charge transport properties of TaOx were experimentally studied and the transport mechanism was quantitatively analyzed with four theoretical dielectric conductivity models. It was found that the charge transport in almost stoichiometric and nonstoichiometric tantalum oxide can be consistently described by the phonon-assisted tunneling between traps.
AB - The atomic and electronic structure of nonstoichiometric oxygen-deficient tantalum oxide TaOx<2.5 grown by ion beam sputtering deposition was studied. The TaOx film content was analyzed by x-ray photoelectron spectroscopy and by quantum-chemistry simulation. TaOx is composed of Ta2O5, metallic tantalum clusters and tantalum suboxides. A method for evaluating the stoichiometry parameter of TaOx from the comparison of experimental and theoretical photoelectron valence band spectra is proposed. The charge transport properties of TaOx were experimentally studied and the transport mechanism was quantitatively analyzed with four theoretical dielectric conductivity models. It was found that the charge transport in almost stoichiometric and nonstoichiometric tantalum oxide can be consistently described by the phonon-assisted tunneling between traps.
KW - charge localization
KW - charge transport
KW - electronic structure
KW - oxygen vacancy
KW - photoelectron spectroscopy
KW - quantumchemistry calculations
KW - THIN-FILMS
KW - TRAP
KW - MECHANISMS
KW - TAOX
KW - OXYGEN VACANCY
KW - quantum-chemistry calculations
KW - CONDUCTION
KW - CRYSTALLINE
UR - http://www.scopus.com/inward/record.url?scp=85047758530&partnerID=8YFLogxK
U2 - 10.1088/1361-6528/aaba4c
DO - 10.1088/1361-6528/aaba4c
M3 - Article
C2 - 29589838
AN - SCOPUS:85047758530
VL - 29
JO - Nanotechnology
JF - Nanotechnology
SN - 0957-4484
IS - 26
M1 - 264001
ER -
ID: 13668229