Electron-Beam Radiation Effects at the Molecular-Beam Epitaxial Growth of CaF2 Film on Silicon

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	809-812
Number of pages	4
Journal	Bulletin of the Russian Academy of Sciences: Physics
Volume	87
Issue number	6
DOIs	https://doi.org/10.3103/S106287382370199X
Publication status	Published - 2023
Externally published	Yes

ID: 55446371