DOI

Translated title of the contributionЭлектронно-пучковая кристаллизация тонких пленок аморфного субоксида кремния
Original languageEnglish
Pages (from-to)263-265
Number of pages3
JournalTechnical Physics Letters
Volume47
Issue number3
DOIs
Publication statusPublished - Mar 2021

    OECD FOS+WOS

  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

    Research areas

  • electron-beam annealing, polycrystalline silicon, silicon-suboxide thin films

ID: 34986524