Research output: Contribution to journal › Article › peer-review
| Original language | English |
|---|---|
| Article number | 124005 |
| Number of pages | 12 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 29 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 5 Nov 2019 |
ID: 22576933