Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Article number | 124005 |
Number of pages | 12 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 29 |
Issue number | 12 |
DOIs | |
Publication status | Published - 5 Nov 2019 |
ID: 22576933