Original languageEnglish
Article number012157
Number of pages6
JournalJournal of Physics: Conference Series
Volume1382
Issue number1
DOIs
Publication statusPublished - 28 Nov 2019
Event3th Siberian Thermophysical Seminar, STS 2019 - Novosibirsk, Russian Federation
Duration: 27 Aug 201929 Aug 2019

    OECD FOS+WOS

    Research areas

  • CHEMICAL-VAPOR-DEPOSITION, GROWTH, NUCLEATION, FILMS

ID: 22967453