Standard

Diagnostics of argon cluster ion beam for materials treatment. / Korobeishchikov, N. G.; Nikolaev, I. V.; Roenko, M. A.

In: Journal of Physics: Conference Series, Vol. 1115, No. 3, 032016, 27.11.2018.

Research output: Contribution to journal › Conference article › peer-review

Harvard

Korobeishchikov, NG, Nikolaev, IV & Roenko, MA 2018, 'Diagnostics of argon cluster ion beam for materials treatment', Journal of Physics: Conference Series, vol. 1115, no. 3, 032016. https://doi.org/10.1088/1742-6596/1115/3/032016

APA

Korobeishchikov, N. G., Nikolaev, I. V., & Roenko, M. A. (2018). Diagnostics of argon cluster ion beam for materials treatment. Journal of Physics: Conference Series, 1115(3), [032016]. https://doi.org/10.1088/1742-6596/1115/3/032016

Vancouver

Korobeishchikov NG, Nikolaev IV, Roenko MA. Diagnostics of argon cluster ion beam for materials treatment. Journal of Physics: Conference Series. 2018 Nov 27;1115(3):032016. doi: 10.1088/1742-6596/1115/3/032016

Author

Korobeishchikov, N. G. ; Nikolaev, I. V. ; Roenko, M. A. / Diagnostics of argon cluster ion beam for materials treatment. In: Journal of Physics: Conference Series. 2018 ; Vol. 1115, No. 3.

BibTeX

@article{4a6c84d97a564886990ed64fd1767247,
title = "Diagnostics of argon cluster ion beam for materials treatment",
abstract = "The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.",
keywords = "SIZE DETERMINATION, ENERGY",
author = "Korobeishchikov, {N. G.} and Nikolaev, {I. V.} and Roenko, {M. A.}",
note = "Publisher Copyright: {\textcopyright} Published under licence by IOP Publishing Ltd.; 6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 ; Conference date: 16-09-2018 Through 22-09-2018",
year = "2018",
month = nov,
day = "27",
doi = "10.1088/1742-6596/1115/3/032016",
language = "English",
volume = "1115",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "3",

}

RIS

TY - JOUR

T1 - Diagnostics of argon cluster ion beam for materials treatment

AU - Korobeishchikov, N. G.

AU - Nikolaev, I. V.

AU - Roenko, M. A.

N1 - Publisher Copyright: © Published under licence by IOP Publishing Ltd.

PY - 2018/11/27

Y1 - 2018/11/27

N2 - The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.

AB - The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.

KW - SIZE DETERMINATION

KW - ENERGY

UR - http://www.scopus.com/inward/record.url?scp=85058243310&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1115/3/032016

DO - 10.1088/1742-6596/1115/3/032016

M3 - Conference article

AN - SCOPUS:85058243310

VL - 1115

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 3

M1 - 032016

T2 - 6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018

Y2 - 16 September 2018 through 22 September 2018

ER -

ID: 17852286