Critical properties and charge transport in ethylene bridged organosilica low-κ dielectrics › Research Explorer

DOI

https://doi.org/10.1063/1.5145239
Final published version

Timofey Perevalov
Andrei A. Gismatulin
Dmitry S. Seregin
Yingjie Wang
Haoyu Xu
Vladimir N. Kruchinin
Evgeniy Spesivcev
Vladimir A. Gritsenko
Kamil A. Nasyrov
Igor P. Prosvirin
Jing Zhang
Konstantin A. Vorotilov
Mikhail R. Baklanov

Original language	English
Article number	195105
Number of pages	12
Journal	Journal of Applied Physics
Volume	127
Issue number	19
DOIs	https://doi.org/10.1063/1.5145239
Publication status	Published - 21 May 2020

Research areas

OXYGEN-DEFICIENT CENTERS, LOW-K, OPTICAL-ABSORPTION, SILICON-OXIDE, THIN-FILMS, CONSTANT, DEFECTS, DAMAGE, SICOH, PHOTOCONDUCTIVITY

OECD FOS+WOS

1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 26096031